Vacuum furnace, a device designed for a specific environment, the principle is that through the vacuum system, the material in the furnace chamber is removed to create a vacuum environment below the standard atmospheric pressure. This process allows the equipment to operate under vacuum and is suitable for a variety of processes.
The structure of vacuum furnace mainly includes furnace, heating element, temperature control system, vacuum system, water cooling system and sealed furnace shell. The furnace is divided into stainless steel, ceramic fiber, molybdenum foil and graphite and other materials, the maximum temperature can reach 2200℃. Heating elements such as resistance wire, silicon carbon rod, molybdenum wire molybdenum rod, silicon molybdenum rod, graphite and induction coil, the highest temperature also reached 2200℃. The vacuum system is composed of vacuum valves, mechanical pumps, diffusion pumps, Roots pumps, etc., to achieve the highest vacuum of 7×10-3Pa. The water cooling system ensures the normal operation of the equipment according to the furnace size. The sealed furnace shell must have good sealing performance to meet the requirements of the vacuum degree of design.
According to the heating method, the vacuum furnace can be divided into vacuum resistance furnace, vacuum induction furnace, vacuum electric arc furnace, vacuum consumable electric arc furnace, electron beam furnace (electron bombardment furnace) and plasma furnace. These devices are widely used in high temperature vacuum sintering, annealing, tempering, aging treatment of ceramic materials, ceramic metal composite materials, refractory metals, alloy materials, and vacuum brazing of alloy tools and superhard materials.