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Vacuum Sublimation Furnace of Silicon Oxide

Suitable for mass production of vapor deposition materials such as silicon oxide; High precision temperature difference control, high temperature vacuum furnace; With high vacuum sublimation, reaction, degreasing, dehydration, vapor deposition material automatic grinding scraping, furnace collection and other special process capabilities.
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氧化亚硅真空升华炉+水印

Suitable for mass production of vapor deposition materials such as silicon oxide; High precision temperature difference control, high temperature vacuum furnace; With high vacuum sublimation, reaction, degreasing, dehydration, vapor deposition material automatic grinding scraping, furnace collection and other special process capabilities.


Equipment features:

A large amount of material, high production efficiency.

The whole process is completely closed and automatic operation to avoid dust flying, and the production site environment is clean and tidy.

The temperature is controlled within 1500 degrees, and the heating rate is fast. Can maintain stable operation under vacuum.


Parameter of Apparatus


Model

GJC-SHL-118

GJC-SHL-226

GJC-SHL-385

GJC-SHL-804

Furnace Structure

Horizontal

Constant Temperature Zone Size

Φ500mm*600mm

Φ600mm*800mm

Φ700mm*1000mm

Φ800mm*1600mm

Furnace Body

The inner and outer double-layer water cooling structure, and the contact part of the cooling water made of 304 stainless steel, effectively prevent the furnace body for a long time to use gas leakage phenomenon

Sublimation System

The heating zone is composed of induction coil, heavy corundum, graphite hard felt and isostatic graphite. The collection area is composed of 310S stainless steel and insulation layer.

Temperature Control System

Using PLC touch screen centralized control mode, automatic control, with network port, can realize remote control.

                    Heating System

It is composed of multistage vacuum pump, vacuum valve, pressure controller and pipeline.

Vacuum System

It is composed of multistage vacuum pump, vacuum valve, pressure controller and pipeline.

Cooling System

。Equipped with closed cooling system, internal circulation with deionized water, will not cause scaling equipment pipeline, internal circulation water loss is small, external circulation with tap water, automatic water refill, fan start heat dissipation; Good heat dissipation effect, integrated environmental protection, small footprint and so on.


The equipment is composed of sublimation system, collection system, heating system, temperature control system, vacuum system, mechanical system and cooling system.  





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